Vortex, the 20th century already has a vortex technology patents. But then the technical level of the restrictions, vortex can not be manufactured, vortex also be forgotten. The scroll mechanism was reintroduced in 1973 and the first model agency was created, making the practical application of this technology possible. Whirlpool mechanism of high reliability, smooth operation, low noise, energy saving potential and great advantages immediately caused the refrigerator industry attention and urgent needs, greatly favored by the industry leader, was quickly put into industrial applications. Scroll compressor technology and products of well-known companies such as Trance, Hitachi and Copland have led the tide of practical application of vortex technology in the world, which has led to technological progress and product upgrading in many industries such as refrigerators and air conditioners. Now scroll technology has been the initial application in the compressor industry to the vacuum pump manufacturing industry, to achieve a no oil, more stable operation, lower noise, more energy-saving scroll vacuum access to practical technology. People use the vortex concepts and principles to create a single-stage, two-stage oil-free vortex vacuum pump products that have no pollution to vacuum application equipment and environment, and are superior to conventional oil pumps in terms of pumping speed, life expectancy and energy consumption. In the early 90s, the world's first scroll vacuum pump to market, the vortex technology thus began as a new type of vacuum access technology is being promoted around the world. So far, the world's vortex vacuum pump manufacturer focused on the United States, Japan and Europe, Japan's Anestta, the United States Varian, Germany's Busch as the representative. Products include from 0.25L / S to 10L / S series of products, some 15L / S or greater pumping capacity of the product is also the pilot phase. Vortex vacuum pump structure principle Clean vacuum environment has always been the ideal vacuum environment for scientists and businesses to pursue.From the beginning to create a vacuum environment, people try to use different means to achieve the effect of cleaning the vacuum.Up to now, clean vacuum access equipment has been developed To condensate pumps, live race pumps, claw pumps, scroll pumps and diaphragm pumps, etc. Among the existing oil-free vacuum pumps, oil-less scroll vacuum pumps have the following characteristics compared with other types of oil-free vacuum pumps : ①oil-free, friction-free - vacuum chamber no oil, non-contact, no wear, no particulate dust pollution, access to clean vacuum; Than the same diameter pump pumping volume of 2 times, to save energy; ③ pumping efficiency - with 3-4 pumping unit, the pressure is small; between the atmosphere and the vacuum sealed by the O-ring, low leakage; ④. Non-contact, good balance, small torque, low noise, small vibration; ⑤. Simple and compact structure, the same size, small radius of motion, stable operation; ⑥ small size, easy maintenance, low maintenance costs; Air cooling, no water cooling. Scroll vacuum pump oil-free scroll vacuum pump used in ①. Semiconductor industry - thin film preparation equipment, semiconductor device packaging equipment; ②. Scientific Instruments Industry - Synchrotron radiation beam lines, electron microscopes, analysis and testing equipment; ③. Machinery and Equipment Industry - - Material preparation equipment, vacuum testing, material purification equipment; ④. Chemical industry; ⑤. Medical equipment - Dental instruments, dialysis machines, biological products and pharmaceutical preparation; ⑥. Packaging industry - food, pharmaceuticals, biological products and other packaging equipment . Oil-free scroll vacuum pump is mainly composed of 5 parts: ①static and dynamic scroll attached to the base; ②. Crankshaft; ③ seal; ④ anti-rotation mechanism; ⑤ motor. The non-oil scroll vortex scroll is a scroll-like disk structure formed by one or more involute helices with one end connected to a plane. A fixed scroll and an orbiting scroll interact with each other and are assembled 180 by the anti-rotation mechanism. Phase difference, so combined with the composition of a pair of scroll to pay the oilless scroll vacuum pump constitutes the basic pumping mechanism. The fixed scroll and the movable scroll are in contact with each other on several straight lines (ie, several points on the cross-section vortex) to form symmetrical pairs of crescent cavities. The orbiting scroll is driven by the crankshaft to rotate around the static Scroll scroll center movement, the fixed scroll and the movable scroll contact point along the vortex curved surface to achieve inspiration, compression and exhaust. For example, in the two-stage oil-free scroll vacuum pump, there are two directions corresponding to the fixed scroll, an orbiting scroll between two scroll. Dynamic and fixed vortex scroll relative movement of the volume of the crescent-shaped vacuum chamber so that the gas suction from the suction port, the exhaust port discharge to complete the suction, compression, exhaust cycle. Each revolution of the crankshaft, there is a new group of crescent cavities formed, so the non-oil vortex vacuum pump suction, compression, exhaust cycles to nearly 1500 rev / min frequency was continuously repeated, the evacuation of gas to form inclusive and mandatory delivery . As we all know, oil-free scroll vacuum pump (Oil free scrloo vacuum pump) compared with the ordinary oil vacuum pump has significant features. Below the ordinary rotary vane vacuum pump as an example to illustrate the difference: Table 1 oil-free vortex vacuum pump with ordinary direct-coupled rotary vane vacuum pump technical indicators of comparison Technical indicators Rotary vane vacuum pump vortex oil-free vacuum pumping speed (1 / s ) 2.0, 4.0, 8.0 2.0, 4.4, 8.7 Ultimate vacuum (pa) 0.6 1.0 Service life (h) 40000 40000 Overhaul interval 8000 8000 Cooling medium oil Air noise (dB) 75 60 Mass (kg) 70 41 Motor Number of phases 3/1 1 Voltage (V) 220/380 220 Power (KW) 1.1 0.6 Revolutions (r / min) 1400 1437 The main advantages of oil-free vortex vacuum pumps include: ①good sealing, no mechanical pump That is directly connected to suction and exhaust chamber leakage channel, easy to seal, easy to reach a higher degree of vacuum ;.. Slewing radius is small, moving scroll relative sliding speed is only about 1/7 of rotary vane vacuum pump, The dynamic seal between the disk is relatively easy to extend the service life of the pump; ③ the compression process will be slower, there are two or three compression process at the same time, the compression chamber relative to the crankshaft symmetry, so that the smooth pump operation, drive And a movable small moment the gas shock wave, so that noise and vibrations of the pump is reduced. All in all, oil-free scroll vacuum pump